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  4. Radiation and Internal Loss Engineering of High-Stress Silicon Nitride Nanobeams
 
research article

Radiation and Internal Loss Engineering of High-Stress Silicon Nitride Nanobeams

Ghadimi, Amir Hossein  
•
Wilson, Dalziel Joseph
•
Kippenberet, Tobias J.
2017
Nano Letters

High-stress Si3N4 nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor (Q)frequency (f) products exceeding 10(13) Hz, enabling (in principle) quantum coherent operation at room temperature. String-like beam resonators possess smaller Q x f products; however, on account of their significantly lower mass and mode density, they remain a canonical choice for precision force, mass, and charge sensing, and have recently enabled Heisenberg-limited position measurements at cryogenic temperatures. Here we explore two techniques to enhance the Q of a nanomechanical beam. The techniques relate to two main loss mechanisms: internal loss, which dominates for high aspect ratios and f less than or similar to 100 MHz, and radiation loss, which dominates for low aspect ratios and f less than or similar to 100 MHz. First, we show that by embedding a nanobeam in a 1D phononic crystal (PnC), it is possible to localize its flexural motion and shield it against radiation loss. Using this method, we realize f > 100 MHz modes with Q approximate to 104, consistent with internal loss and contrasting sharply with unshielded beams of similar dimensions. We then study the Q x f product of high-order modes of millimeter-long nanobeams. Taking advantage of the mode-shape dependence of stress-induced loss dilution, we realize a f approximate to 4 MHz mode with Q x f approximate to 9 x 10(12) Hz. Our results complement recent work on PnC-based soft-clamping of nanomembranes, in which mode localization is used to enhance loss dilution. Combining these strategies should enable ultra-low-mass nanobeam oscillators that operate deep in the quantum coherent regime at room temperature.

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Type
research article
DOI
10.1021/acs.nanolett.7b00573
Web of Science ID

WOS:000403631600027

Author(s)
Ghadimi, Amir Hossein  
Wilson, Dalziel Joseph
Kippenberet, Tobias J.
Date Issued

2017

Publisher

Amer Chemical Soc

Published in
Nano Letters
Volume

17

Issue

6

Start page

3501

End page

3505

Subjects

nanomechanics

•

phononic crystal

•

acoustic shield

•

optomechanics

•

radiation loss

•

internal loss

•

high stress

•

silicon nitride

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
IPHYS  
Available on Infoscience
July 10, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/139015
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