research article
Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator
2006
Type
research article
Web of Science ID
WOS:000239218400051
Author(s)
Date Issued
2006
Published in
Volume
514
Issue
1-2
Start page
341
End page
343
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 18, 2007
Use this identifier to reference this record