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  4. High-throughput nanofabrication of plasmonic structures and metamaterials with high resolution nanostencil lithography
 
conference paper

High-throughput nanofabrication of plasmonic structures and metamaterials with high resolution nanostencil lithography

Aksu, Serap
•
Huang, Min
•
Artar, Alp
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MartinPalma, R. J.
•
Jen, Y. J.
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2011
NANOSTRUCTURED THIN FILMS IV
NANOSTRUCTURED THIN FILMS IV

We demonstrate a novel fabrication approach for high-throughput fabrication of engineered plasmonic antenna arrays and metamaterials with Nanostencil Lithography (NSL). NSL technique, relying on deposition of materials through a shadow mask, offers the flexibility and the resolution to fabricate radiatively engineer nanoantenna arrays for excitation of collective plasmonic resonances. We confirmed that the antenna arrays fabricated by NSL shows high optical quality similar to EBL fabricated ones. Furthermore, we show nanostencils can be reused multiple times to fabricate selfsame structures with identical optical responses repeatedly and reliably. This capability is particularly useful when high-throughput replication of the optimized nanoparticle arrays is desired. In addition to its high-throughput capability, NSL permits single step nanofabrication of plasmonic devices on surfaces that are difficult to work with electron/ion beam techniques. Nanostencil lithography is a resist free process thus allows the transfer of the nanopatterns to any planar substrate whether it is conductive, insulating or magnetic. As proof of the versatility of the NSL technique, we show fabrication of plasmonic structures and metamaterials in variety of geometries. In metamaterial and plasmonic devices, unique geometries with small gaps and asymmetries can induce novel electromagnetic responses such as plasmon induced transparency and also giant near-field intensities that are important for enhanced vibrational spectroscopy and non-linear optics applications. This nanofabrication scheme, enabling the reusability of stencil and offering flexibility on the substrate choice and nano-pattern design could significantly enhance wide-use of plasmonics in sensing technologies.

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Type
conference paper
DOI
10.1117/12.894192
Author(s)
Aksu, Serap
Huang, Min
Artar, Alp
Yanik, Ahmet A.
Altug, Hatice
Editors
MartinPalma, R. J.
•
Jen, Y. J.
•
Mackay, T. G.
Date Issued

2011

Publisher

SPIE-INT SOC OPTICAL ENGINEERING

Published in
NANOSTRUCTURED THIN FILMS IV
ISBN of the book

978-0-8194-8714-8

Series title/Series vol.

Proceedings of SPIE

Volume

8104

Subjects

metamaterials

•

nanoplasmonics

•

nanostencil lithography

•

near-field effects

•

optical nanoantenna

•

Shadow mask

•

surface plasmons

Note

Conference on Nanostructured Thin Films IV, San Diego, CA, AUG 23-25, 2011

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
BIOS  
Event nameEvent place
NANOSTRUCTURED THIN FILMS IV

1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA

Available on Infoscience
August 16, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/128647
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