research article
Fabrication of Fresnel zone plates for hard X-rays
A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100nm and structures of 1μm height are fabricated. Preliminary focusing results at an X-ray energy of 8keV are presented and ways to improve the zone plate parameters are discussed.
Type
research article
Author(s)
Date Issued
2007
Published in
Volume
84
Issue
5-8
Start page
1467
End page
1470
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 11, 2007
Use this identifier to reference this record