Electrical Investigation of Porous Silicon/p-Si Heterojunction Prepared by Electrochemical Etching
We presented the conduction mechanism investigation of porous silicon/p-Si heterojunction fabricated on low resistivity crystalline silicon by electrochemical anodization. Measurements of the current - voltage I(V) and capacitance - voltage C(V) characteristics were used for the study of the electrical properties of this heterojunction. A deeper understanding of the physical mechanisms involved in the Au/porous silicon contacts and porous silicon/p-Si interface can be obtained from the voltage dependence of the fitting parameters according to electrical model circuits in DC and AC. We found in the heterojunction important conduction mechanisms: the resonant tunnelling, SCLC and the dielectric relaxation due to the pores layers at high frequencies. (c) 2016 The Electrochemical Society. All rights reserved.
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Chavarria, M. A., & Fonthal, F. (2016). Electrical Investigation of Porous Silicon/p-Si Heterojunction Prepared by Electrochemical Etching. Ecs Journal of Solid State Science and Technology, 5(4), P3172–P3175. https://doi.org/10.1149/2.0241604jss
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WOS:000373212500025
2016
5
4
P3172
P3175
REVIEWED
EPFL