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research article

In-situ localized carbon nanotube growth inside partially sealed enclosures

Van De Burgt, Y.
•
Champion, A.
•
Bellouard, Yves  
2013
AIP Advances

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. Our experiments raise interesting observations related to the gas diffusion dynamics in micro-scale and sub-micron enclosures.

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Type
research article
DOI
10.1063/1.4821952
Author(s)
Van De Burgt, Y.
Champion, A.
Bellouard, Yves  
Date Issued

2013

Publisher

American Institute of Physics

Published in
AIP Advances
Volume

3

Issue

9

Article Number

092119

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116417
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