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  4. Nitrogen incorporation at Si(001)-SiO2 interfaces: Relation between N 1s core-level shifts and microscopic structure
 
research article

Nitrogen incorporation at Si(001)-SiO2 interfaces: Relation between N 1s core-level shifts and microscopic structure

Rignanese, G. M.
•
Pasquarello, Alfredo  orcid-logo
•
Charlier, J. C.
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1997
Physical Review Letters

Using a first-principles approach, we study the incorporation of nitrogen at the Si(001)-SiO2 interface by calculating N Is core-level shifts for several relaxed interface models. The unusually large shift with oxide thickness of the principal peak in photoemission spectra is explained in terms of a single first-neighbor configuration in which the N atom Is always bonded to three Si atoms, both in the interfacial region and further in the oxide. Core-hole relaxation and second nearest neighbor effects concur in yielding larger binding energies in the oxide than at the interface. The calculations do not support the occurrence of N-O bonds at nitrided Si(001)-SiO2 interfaces.

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Type
research article
DOI
10.1103/PhysRevLett.79.5174
Author(s)
Rignanese, G. M.
Pasquarello, Alfredo  orcid-logo
Charlier, J. C.
Gonze, X.
Car, R.
Date Issued

1997

Published in
Physical Review Letters
Volume

79

Issue

25

Start page

5174

End page

5177

Subjects

numbers: 79.60.Jv

•

68.35. -p

•

73.20. -r

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CSEA  
Available on Infoscience
October 8, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43387
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