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  4. Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching
 
research article

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Tielen, Viktor
•
Bellouard, Yves  
2014
Micromachines

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.

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Type
research article
DOI
10.3390/mi5030697
Author(s)
Tielen, Viktor
Bellouard, Yves  
Date Issued

2014

Publisher

MDPI

Published in
Micromachines
Volume

5

Issue

3

Start page

697

End page

710

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116406
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