research article
Piezoelectric materials parameters for piezoelectric thin films in GHz applications
Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, materials and properties for thin-film bulk acoustic wave resonators are discussed on some selected issues: the piezoelectric coefficients and acoustic losses of AlN, the relation of the first one with microstructural parameters, the inclusion of parasitic elements, and the merits of and problems with ferroelectric materials.
Type
research article
Author(s)
Date Issued
2009
Publisher
Volume
1
Issue
1
Article Number
19-27
Note
National Licences
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
January 22, 2010
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