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research article

Piezoelectric materials parameters for piezoelectric thin films in GHz applications

Muralt, P.  
•
Conde, J.
•
Artieda, A.
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2009
nternational Journal of Microwave and Wireless Technologies

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, materials and properties for thin-film bulk acoustic wave resonators are discussed on some selected issues: the piezoelectric coefficients and acoustic losses of AlN, the relation of the first one with microstructural parameters, the inclusion of parasitic elements, and the merits of and problems with ferroelectric materials.

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Type
research article
DOI
10.1017/S1759078709000038
Author(s)
Muralt, P.  
•
Conde, J.
•
Artieda, A.
•
Martin, F.  
•
Cantoni, M  
Date Issued

2009

Publisher

Cambridge University Press

Published in
nternational Journal of Microwave and Wireless Technologies
Volume

1

Issue

1

Article Number

19-27

Note

National Licences

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
January 22, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45925
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