conference paper
Laser-initiated Ga-deposition on quartz substrates
Rytz-Froidevaux, Y.
•
Salathe, R. P.
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Gilgen, H. H.
1983
Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium
The deposition of Ga on quartz substrates by photodissociation of trimethylgallium has been investigated. Light from a frequency doubled Ar-ion laser beam (257.2 nm) was focused onto quartz substrates. The Ar-ion laser was operated under CW or mode-locking conditions. The deposition rate has been investigated as a function of averaged UV power densities in the range of 1.8-1750 W/cm2 and is shown to depend critically on the laser operating mode. For CW operation, the maximum growth rate within the focal zone is limited to 17 Å/s whereas under mode-locking conditions, no saturation is observed and the growth rate increases linearly with the laser power up to 70 Å/s at 1.75 kW/cm2