conference paper
High-precision flexure-based XY-stage with high stiffness and load capacity
June 14, 2024
Typical flexure-based XY-stages have a serial design, and their layout results in the flexures being loaded in flection in face of heavy payloads or vertical loads. This paper presents a design with zero parasitic shift in which all flexures are loaded in traction/compression, resulting in a high-precision and high-load-capacity flexure-based XY-stage. A proof-of-concept demonstrator validates the concept and numerical simulations indicates sub-micron straightness error.
Type
conference paper
Author(s)
Date Issued
2024-06-14
Subjects
URL
Link to the conference paper
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event acronym | Event place | Event date |
EUSPEN | Dublin, Ireland | 2024-06-10 - 2024-06-14 | |
Available on Infoscience
August 9, 2024
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