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conference paper

High-precision flexure-based XY-stage with high stiffness and load capacity

Flückiger, Patrick Robert  
•
Schneegans, Hubert Pierre-Marie Benoît  
•
Prêcheur-Llarena, Simon Hubert  
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June 14, 2024
Euspen’s 24th International Conference & Exhibition

Typical flexure-based XY-stages have a serial design, and their layout results in the flexures being loaded in flection in face of heavy payloads or vertical loads. This paper presents a design with zero parasitic shift in which all flexures are loaded in traction/compression, resulting in a high-precision and high-load-capacity flexure-based XY-stage. A proof-of-concept demonstrator validates the concept and numerical simulations indicates sub-micron straightness error.

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Type
conference paper
Author(s)
Flückiger, Patrick Robert  

EPFL

Schneegans, Hubert Pierre-Marie Benoît  

EPFL

Prêcheur-Llarena, Simon Hubert  

EPFL

Baur, Charles  

EPFL

Henein, Simon  

EPFL

Date Issued

2024-06-14

Subjects

Flexure

•

XY-stage

•

high precision

•

straightness

•

compliant mechanism

URL

Link to the conference paper

https://www.euspen.eu/resource/high-precision-flexure-based-xy-stage-with-high-stiffness-and-load-capacity/
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
INSTANT-LAB  
Event nameEvent acronymEvent placeEvent date
Euspen’s 24th International Conference & Exhibition

EUSPEN

Dublin, Ireland

2024-06-10 - 2024-06-14

Available on Infoscience
August 9, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/240674
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