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  4. High-precision flexure-based XY-stage with high stiffness and load capacity
 
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High-precision flexure-based XY-stage with high stiffness and load capacity

Flückiger, Patrick Robert  
•
Schneegans, Hubert Pierre-Marie Benoît  
•
Prêcheur-Llarena, Simon Hubert  
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June 14, 2024
Euspen’s 24th International Conference & Exhibition

Typical flexure-based XY-stages have a serial design, and their layout results in the flexures being loaded in flection in face of heavy payloads or vertical loads. This paper presents a design with zero parasitic shift in which all flexures are loaded in traction/compression, resulting in a high-precision and high-load-capacity flexure-based XY-stage. A proof-of-concept demonstrator validates the concept and numerical simulations indicates sub-micron straightness error.

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2024_High-precision flexure-based XY-stage with high stiffness and load capacity.pdf

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Main Document

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openaccess

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CC0

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579.89 KB

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Adobe PDF

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a36d3e833ab1a2f35bd8dff93feeb256

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