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conference paper
High-precision flexure-based XY-stage with high stiffness and load capacity
June 14, 2024
Typical flexure-based XY-stages have a serial design, and their layout results in the flexures being loaded in flection in face of heavy payloads or vertical loads. This paper presents a design with zero parasitic shift in which all flexures are loaded in traction/compression, resulting in a high-precision and high-load-capacity flexure-based XY-stage. A proof-of-concept demonstrator validates the concept and numerical simulations indicates sub-micron straightness error.
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Name
2024_High-precision flexure-based XY-stage with high stiffness and load capacity.pdf
Type
Main Document
Access type
openaccess
License Condition
CC0
Size
579.89 KB
Format
Adobe PDF
Checksum (MD5)
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