Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. High-resolution, large-area fabrication of compliant electrodes via laser ablation for robust, stretchable dielectric elastomer actuators and sensors
 
research article

High-resolution, large-area fabrication of compliant electrodes via laser ablation for robust, stretchable dielectric elastomer actuators and sensors

Araromi, Seun  
•
Rosset, Samuel  
•
Shea, Herbert  
2015
ACS Applied Materials & Interfaces

A key element in stretchable actuators, sensors and systems based on elastomer materials are compliant electrodes. While there exist many methodologies for fabricating electrodes on dielectric elastomers, very few succeed in achieve high-resolution patterning over large areas. We present a novel approach for the production of mechanically robust, high-resolution compliant electrodes for stretchable silicone elastomer actuators and sensors. 2 to 50 µm thick cast poly(dimethylsiloxane)(PDMS)-carbon composite layers are patterned by laser ablation and subsequently bonded to a PDMS membrane by oxygen plasma activation. The technique affords great design flexibility and high-resolution, and readily scales to large area arrays of devices. We validate our methodology by producing arrays of actuators and sensors on up to A4-size substrates, reporting on dielectric elastomer micro-scale actuators generating area strains of over 25%, and interdigitated capacitive touch sensors with high sensitivity yet insensitivity to substrate stretching. We demonstrate the ability to co-fabricate highly integrated multifunctional transducers using the same process flow, showing the methodology’s promise in realizing sophisticated and reliable complex stretchable devices with fine features over large areas.

  • Files
  • Details
  • Metrics
Type
research article
DOI
10.1021/acsami.5b04975
Web of Science ID

WOS:000360027100061

Author(s)
Araromi, Seun  
Rosset, Samuel  
Shea, Herbert  
Date Issued

2015

Publisher

Amer Chemical Soc

Published in
ACS Applied Materials & Interfaces
Volume

7

Issue

32

Start page

18046

End page

18053

Subjects

dielectric elastomer sensors

•

dielectric elastomer actuators

•

laser ablation

•

oxygen plasma-bonding

•

electroactive polymers

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMTS  
Available on Infoscience
August 3, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116771
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés