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  4. Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS
 
research article

Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS

Batooli, Leili  
•
Maldonado, Sandra Guadalupe
•
Judelewicz, Moshe
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2015
Micromachines

Tribology of SU-8 polymer is increasingly relevant due to bursting use of this material in a variety of applications. This study is directed towards introduction and investigation of a novel self-lubricating composite of an ionic liquid (IL) in SU-8. The new material can be utilized for fabrication of lubricating polymer coating with tunable surface properties or SU8-made elements for microelectromechanical systems (MEMS) with enhanced tribological performance. It is shown that addition of IL drastically alters water affinity of the composite while UV patternability remains unmodified. A lower coefficient of friction and wear has been obtained for two investigated compositions with 4 and 10 wt % ionic liquid.

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