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  4. Fabrication of nanoporous membranes through silicon templates : two different approaches
 
conference paper

Fabrication of nanoporous membranes through silicon templates : two different approaches

Varricchio, S. S. G
•
Piacentini, N.
•
Bertsch, Arnaud  
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2016
Proceedings of MNF 2016
5th Micro and Nano Flows Conference (MNF 2016)

We present here a novel approach to fabricate nanoporous membranes based on the use of sacrificial template structures to individually define pore parameters such as geometry, shape, and placement. Based on this rationale two different nano-fabrication methods were developed; one resulting in conical multilayered nanopores arrays with openings with critical dimensions down to 60 nm; and a second one resulting in high aspect ratio nanopores with diameters down to 17 nm and 1 μm length. The presented methods are relevant for the fields of nanofabrication and nanofluidics since they extend the shapes, geometries and materials into which nanoporous membranes can be obtained.

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Type
conference paper
Author(s)
Varricchio, S. S. G
Piacentini, N.
Bertsch, Arnaud  
Renaud, Philippe  
Date Issued

2016

Published in
Proceedings of MNF 2016
Start page

ID197.1

End page

2

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Event nameEvent placeEvent date
5th Micro and Nano Flows Conference (MNF 2016)

Milan, Italy

September 11-14, 2016

Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/134286
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