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  4. Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling
 
conference paper

Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Graziosi, T
•
Mi, Sichen  
•
Kiss, M
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2018
Advances in Photonics of Quantum Computing, Memory, and Communication XI
SPIE OPTO 27
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