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research article

Intrinsic Polarization Super Junctions: Design of Single and Multichannel GaN Structures

Nela, Luca  
•
Erine, Catherine  
•
Miran Zadeh, Amirmohammad  
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March 3, 2022
IEEE Transactions on Electron Devices

Super junctions (SJs) have enabled unprecedented performance in Silicon power devices, which could be further improved by applying this concept to wide bandgap semiconductors like gallium nitride (GaN). Currently, polarization super junctions (PSJs) are the most promising candidates for GaN SJs. Yet, until now, p-type doping of the GaN cap layer was required to ensure the presence of a 2-D hole gas (2DHG), and the proper charge matching between the 2DHG and 2-D electron gas (2DEG), which is fundamental to the operation of SJs. This approach, however, requires precise control of the p-GaN doping level, which is very challenging and has hindered the demonstration of high-performance PSJs. Besides, while PSJs are particularly promising for multichannel structures aimed at reducing the sheet resistance, achieving proper charge matching combined with large electron density for all the buried channels is challenging. Here, we propose a simple and robust platform for intrinsic PSJs (i-PSJs) that enables excellent charge matching for a wide range of structures, without relying on doping. We show that surface donor states are the origin of charge mismatch and provide a strategy to minimize their impact. Simulated devices based on this structure show optimal carrier depletion with a flat electric field profile in the whole drift region. Finally, we extend this concept to multichannel i-PSJ structures. We demonstrate a much-reduced sheet resistance down to 58 Ω /sq and present a robust strategy to achieve charge balance, which enables reducing the on-resistance without degrading the off-state performance, thus greatly improving the device figure-of-merit.

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Type
research article
DOI
10.1109/TED.2022.3151558
Author(s)
Nela, Luca  
Erine, Catherine  
Miran Zadeh, Amirmohammad  
Matioli, Elison  
Date Issued

2022-03-03

Published in
IEEE Transactions on Electron Devices
Volume

69

Start page

1798

End page

1804

Subjects

Charge balance

•

Gallium Nitride (GaN)

•

Multi Channel

•

Polarization Super Junction (PSJ)

•

Power Devices

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
POWERLAB  
Available on Infoscience
March 7, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/186066
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