conference paper
Anchor Losses Dependence on Electrode Material in Contour Mode Resonators
2016
2016 IEEE International Frequency Control Symposium (IFCS)
We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore the quality factor. Also, improvement in, quality factor, can be achieved via acoustic matching between the electrodes and the active piezoelectric layer.
Type
conference paper
Web of Science ID
WOS:000389204500024
Author(s)
Date Issued
2016
Publisher
Publisher place
New York
Published in
2016 IEEE International Frequency Control Symposium (IFCS)
ISBN of the book
978-1-5090-2091-1
Total of pages
4
Start page
100
End page
103
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
New Orleans, Luisiana, USA | May 9-12, 2016 | |
Available on Infoscience
August 26, 2016
Use this identifier to reference this record