conference paper
Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic
1997
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS
In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.
Type
conference paper
Web of Science ID
WOS:A1997BJ35B00350
Author(s)
Date Issued
1997
Published in
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS
Volume
2
Start page
1419
End page
1422
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
CHICAGO, IL | JUN 16-19, 1997 | |
Use this identifier to reference this record