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conference paper not in proceedings

Piezoelectric Nanoelectromechanical Systems

Howell, Kaitlin  
•
De Pastina, Annalisa  
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Lozzi, Andrea  
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July 27, 2017
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.

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