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  4. Design, fabrication and optimization of a silicon MEMS natural gas sensor
 
conference paper

Design, fabrication and optimization of a silicon MEMS natural gas sensor

Shaker, Marjan  
•
Sundfor, E
•
Farine, Gaël André Léon  
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August 17, 2017
Proceedings
Eurosensors XXXI
  • Details
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Type
conference paper
DOI
10.3390/proceedings1040470
Author(s)
Shaker, Marjan  
Sundfor, E
Farine, Gaël André Léon  
Slater, Conor Joseph  
Farine, Pierre-André  
Briand, Danick  
Date Issued

2017-08-17

Published in
Proceedings
Volume

1

Start page

470

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMTS  
Event nameEvent placeEvent date
Eurosensors XXXI

Paris, France

September 3-6, 2017

Available on Infoscience
April 2, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/145859
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