conference paper
Design, fabrication and optimization of a silicon MEMS natural gas sensor
August 17, 2017
Proceedings
Type
conference paper
Author(s)
Date Issued
2017-08-17
Published in
Proceedings
Volume
1
Start page
470
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Paris, France | September 3-6, 2017 | |
Available on Infoscience
April 2, 2018
Use this identifier to reference this record