research article
Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI
Type
research article
Web of Science ID
WOS:000425326300001
Author(s)
Esfahani, MN
Kilinc, Y
Karakan, MC
Orhan, E
Hanay, MS
Leblebici, Y
Alaca, BE
Date Issued
2018
Published in
Volume
28
Issue
4
Article Number
045006
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record