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  4. Effect of composition and microstructure on the transport and piezoresistive properties of thick-film resistors
 
conference paper

Effect of composition and microstructure on the transport and piezoresistive properties of thick-film resistors

Grimaldi, Claudio  
•
Vionnet Menot, Sonia  
•
Maeder, Thomas  
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2004
XXVIII International Conference of IMAPS Poland Chapter
XXVIII International Conference of IMAPS Poland Chapter

The piezoresistive effect of thick-film resistors has found widespread application in pressure and force sensors due to their high strain-sensitivity, stability and low-cost. The main material requirements for these applications are a high piezoresistive response, low noise and low temperature dependence. However, many useful elastic substrate materials are degraded at the standard thick-film processing temperature of 850 °C, and therefore require a lower one. This is achieved by engineering the glass composition. Here we discuss how the composition and microstructure affect the electronic properties of thick-film resistors with both high and low processing temperatures. Depending on the firing temperature, we find percolative or non-percolative behaviors in the range of Ru02 concentrations studied. We show that for percolative samples a lowering of the Ru02 concentration generally leads to a logarithmic increase of the piezoresistive response, which poses serious limitations regarding the associated power- law increase of noise.

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Type
conference paper
Author(s)
Grimaldi, Claudio  
Vionnet Menot, Sonia  
Maeder, Thomas  
Ryser, Peter  
Date Issued

2004

Published in
XXVIII International Conference of IMAPS Poland Chapter
Start page

35

End page

42

Subjects

technologie des couches epaisses

•

thick-film technology

•

technologie hybride

•

couches épaisses

•

résistances basse température

•

cuisson

•

transport

•

piézorésistivité

•

système complet

Note

Article de revue sur les travaux effectués au LPM dans le domaine des résistances à basse température. La présentation discute plus extensivement les tenants et aboutissants, ainsi que le système complet de couches épaisses.

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LPM  
Event name
XXVIII International Conference of IMAPS Poland Chapter
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/232020
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