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research article

Coupling silicon lithography with metal casting

Borasi, Luciano  
•
Frasca, Simone  
•
Nicolet-Dit-Felix, Kleber
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December 1, 2022
Applied Materials Today

Micron-scale shaped 2D or 2.5D structures made of silver or copper can be produced by combining silicon photolithographic etching with metal casting by pressure infiltration. This combination of two classical pro-cesses, one from semiconductor fabrication and the other from the metallurgical industries, combines advantages of lithography and casting, namely excellent dimensional control, high reproducibility, compatibility with en-gineering metals used in microtechnology, and the possibility for high production rates since many parts can be produced simultaneously at every step of the process. We demonstrate the production of 2D and 2.5D structures including monocrystalline tensile specimens, of diameter selected in the range from 2.5 to 13 mu m. In-situ micromechanical tensile tests performed on those samples show that microcast metal structures produced via this approach exhibit characteristics of confined plasticity, namely increases, with decreasing sample diameter, in both the flow stress and deformation intermittency.

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Type
research article
DOI
10.1016/j.apmt.2022.101647
Web of Science ID

WOS:000877522800001

Author(s)
Borasi, Luciano  
Frasca, Simone  
Nicolet-Dit-Felix, Kleber
Charbon, Edoardo  
Mortensen, Andreas  
Date Issued

2022-12-01

Published in
Applied Materials Today
Volume

29

Article Number

101647

Subjects

Materials Science, Multidisciplinary

•

Materials Science

•

microfabrication

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microcasting

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metal micromanufacturing

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plasticity size effects

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tensile testing

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deformation-behavior

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strength

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size

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microstructures

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fabrication

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mechanisms

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plasticity

Editorial or Peer reviewed

REVIEWED

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November 21, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/192364
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