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  4. Lab on skin™: 3D monolithically integrated zero-energy micro/nanofludics and FD SOI ion sensitive FETs for wearable multi-sensing sweat applications
 
conference paper

Lab on skin™: 3D monolithically integrated zero-energy micro/nanofludics and FD SOI ion sensitive FETs for wearable multi-sensing sweat applications

Bellando, F.  
•
Garcia-Cordero, E.  
•
Wildhaber, F.
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December 5, 2017
2017 International Electron Devices Meeting. TECHNICAL DIGEST
2017 IEEE International Electron Devices Meeting - IEDM 2017

This paper reports a novel fully integrated low power multi-sensing smart system, which, by wafer-level 3D heterogeneous integration of Ion Sensitive Fully Depleted (FD) FETs and SU-8 micro/nanofludics, achieves the first of its kind wearable multi-sensing system, called Lab on Skin TM , capable to detect biomarkers in human sweat. In the reported configuration, the multi-sensing system exploits arrays of functionalized sensors capable to simultaneously detect pH, Na+ and K+ concentrations in sweat in real time. We present a detailed electrical DC and dynamic characterization, showing excellent sensitivities (52mV/dec for pH and -37mV/dec for Na + sensors) with ultra-low power consumption (less than 50 nWatts/sensor). We report ion cross-sensitivities and a differential measurement approach that allows calibrated measurements. Overall, the paper reports significant advances in the design and fabrication of micro/nanofludics channels, inlets compatible with human skin pore size and density, and outlet passive pumps with flow rates of tens of pl/s; all capable of exploiting capillary forces in order to provide a zero energy pumping of sweat into sensing channels. Moreover, we report the first integration of a miniaturized Ag/AgCl Quasi-Reference Electrodes (QRE) into the sensing system, with long term stability, paving the way for fully wearable electronic chips in flexible patches or as plug-in modules in wrist based devices.

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Type
conference paper
DOI
10.1109/IEDM.2017.8268413
Author(s)
Bellando, F.  
Garcia-Cordero, E.  
Wildhaber, F.
Longo, J.
Guerin, H.
Ionescu, A. M.  
Date Issued

2017-12-05

Published in
2017 International Electron Devices Meeting. TECHNICAL DIGEST
ISBN of the book

978-1-5386-3559-9

Start page

18.1.1

End page

18.1.4

Subjects

FD SOI ISFET

•

Passive capillary microfluidics

•

Self-Assembled Monolayers

•

Sweat sensing

•

Wearable sensor

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
2017 IEEE International Electron Devices Meeting - IEDM 2017

San Francisco, CA, US

December 2-6, 2017

Available on Infoscience
January 27, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/164940
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