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conference paper

Micro-Channel Plate Detectors Based on Hydrogenated Amorphous Silicon

Wyrsch, Nicolas
•
Powolny, François
•
Despeisse, Matthieu  
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2010
MRS Proceedings
MRS Spring Meeting, San Francisco 2010

A new type of micro-channel plate detector based on hydrogenated amorphous silicon is proposed which overcomes the fabrication and performance issues of glass or bulk silicon ones. This new type of detectors consists in 80-100 μm thick layers of amorphous silicon which are micro-machined by deep reactive ion etching to form the channels. This paper focuses on the structure and fabrication process and presents first results obtained with test devices on electron detection which demonstrate amplification effects. Fabrication and performance issues are also discussed.

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Type
conference paper
DOI
10.1557/PROC-1245-A08-04
Author(s)
Wyrsch, Nicolas
•
Powolny, François
•
Despeisse, Matthieu  
•
Dunand, Sylvain
•
Jarron, Pierre
•
Ballif, Christophe  
Date Issued

2010

Journal
MRS Proceedings
Volume

1245

Start page

A08

End page

04

Note

IMT-NE Number: 558

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
PV-LAB  
Event nameEvent place
MRS Spring Meeting, San Francisco 2010

San Francisco

Available on Infoscience
April 26, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/49747
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