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conference paper
Micro-Channel Plate Detectors Based on Hydrogenated Amorphous Silicon
2010
MRS Proceedings
A new type of micro-channel plate detector based on hydrogenated amorphous silicon is proposed which overcomes the fabrication and performance issues of glass or bulk silicon ones. This new type of detectors consists in 80-100 μm thick layers of amorphous silicon which are micro-machined by deep reactive ion etching to form the channels. This paper focuses on the structure and fabrication process and presents first results obtained with test devices on electron detection which demonstrate amplification effects. Fabrication and performance issues are also discussed.
Type
conference paper
Author(s)
Wyrsch, Nicolas
•
Powolny, François
•
•
Dunand, Sylvain
•
Jarron, Pierre
•
Date Issued
2010
Journal
MRS Proceedings
Volume
1245
Start page
A08
End page
04
Note
IMT-NE Number: 558
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Event name | Event place |
San Francisco | |
Available on Infoscience
April 26, 2010
Use this identifier to reference this record