conference paper not in proceedings
Planar Integrated Sensors on Waveguides for sensing applications
2011
We investigate the use of a metallic nano-cavity on dielectric waveguides for sensing applications. Nowadays the fabrication of metallic structures featured by challenging dimensions is feasible thanks to the most recent technologies such as E-Beam Lithography (EBL) and lift-off [1]. We propose here to study the simulation, fabrication and characterization of such structures at the telecom wavelength (λ=1.55 μm).
Type
conference paper not in proceedings
Author(s)
Date Issued
2011
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Busan, South Korea | May 15-20, 2011 | |
Available on Infoscience
September 27, 2011
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