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  4. Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum
 
research article

Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Herle, Dorian  
•
Kiselev, Andrei  
•
Villanueva, Luis Guillermo  
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May 31, 2023
Acs Photonics

Reflectivity modulation is a critical feature for applicationsin telecommunications, 3D imaging and printing, advanced laser machining,or portable displays. Tunable metasurfaces have recently emerged asa promising implementation for miniaturized and high-performance tunableoptical components. Commonly, metasurface response tuning is achievedby electro-optical effects. In this work, we demonstrate reflectivitymodulation based on a nanostructured, mechanically tunable, metasurface,consisting of an amorphous silicon nanopillar array and a suspendedamorphous silicon membrane with integrated electrostatic actuators.With a membrane displacement of only 150 nm, we demonstrate reflectivitymodulation by Mie resonance enhanced absorption in the pillar array,leading to a reflectivity contrast ratio of 1:3 over the spectralrange from 400-530 nm. With fast, low-power electrostatic actuationand a broadband response in the visible spectrum, this mechanicallytunable metasurface reflectivity modulator could enable high framerate dynamic reflective displays.

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Type
research article
DOI
10.1021/acsphotonics.3c00276
Web of Science ID

WOS:001008996100001

Author(s)
Herle, Dorian  
Kiselev, Andrei  
Villanueva, Luis Guillermo  
Martin, Olivier J. F.  
Quack, Niels  
Date Issued

2023-05-31

Publisher

AMER CHEMICAL SOC

Published in
Acs Photonics
Volume

10

Issue

6

Start page

1882

End page

1889

Subjects

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Optics

•

Physics, Applied

•

Physics, Condensed Matter

•

Science & Technology - Other Topics

•

Materials Science

•

Optics

•

Physics

•

metasurface

•

mems

•

optics

•

tunability

•

visible spectrum

•

mems

•

si

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NAM  
NEMS  
Available on Infoscience
July 3, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/198679
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