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  4. Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes
 
research article

Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Liffredo, Marco  
•
Xu, Nan  
•
Stettler, Silvan  
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2024
Journal of Vacuum Science & Technology

Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary to fine-tune the deposition parameters to achieve a good film. In this paper, we investigate depositions of highly doped AlScN (40% Sc) on unpatterned and patterned metal layers, to show how it is possible to maintain a good film quality on a metal electrode. We find how high-temperature deposition of the metal improves the AlScN film quality, how the gas mixture allows to reduce defects, and how film quality changes with thickness. We show that extreme care must be taken in the apparently trivial step of photoresist cleaning. Finally, we extract the mechanical, electrical, and piezoelectric properties of our optimized layer from a batch of fabricated resonators, obtaining a 5× improvement of piezoelectric coupling compared to undoped AlN and a 1.5× improvement from 32% doped AlScN.

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Type
research article
DOI
10.1116/6.0003497
Author(s)
Liffredo, Marco  
Xu, Nan  
Stettler, Silvan  
Peretti, Federico  
Villanueva, Luis Guillermo  
Date Issued

2024

Published in
Journal of Vacuum Science & Technology
Volume

A42

Issue

4

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
FunderGrant Number

FNS

200020-184935

FNS

CRII5-189967

FNS

206021-205378

Available on Infoscience
May 15, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/207890
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