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  4. 30nm Metallic Slot Array for Sensing: Theoretical and Experimental Study
 
conference paper

30nm Metallic Slot Array for Sensing: Theoretical and Experimental Study

Tan, Qing  
•
Cosentino, Armando  
•
Roussey, Matthieu
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2011
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
16th International Conference on Optical MEMS and Nanophotonics

The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).

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