conference paper
30nm Metallic Slot Array for Sensing: Theoretical and Experimental Study
2011
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).