conference paper
Integration of micro-optics and micromechanics
2003
CLEO/EUROPE-EQEC 2003
Type
conference paper
Author(s)
Date Issued
2003
Published in
CLEO/EUROPE-EQEC 2003
Series title/Series vol.
Conference Digest
Volume
27E
Start page
CM3
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record