research article
High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology
We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm.
Type
research article
Web of Science ID
WOS:000282766600006
Author(s)
Date Issued
2010
Publisher
Published in
Volume
RP5
Article Number
10035s
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
September 10, 2010
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