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  4. High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology
 
research article

High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology

Filter, Robert
•
Scharf, Toralf  
•
Herzig, Hans Peter  
2010
Journal of the European Optical Society

We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm.

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Type
research article
DOI
10.2971/jeos.2010.10035s
Web of Science ID

WOS:000282766600006

Author(s)
Filter, Robert
Scharf, Toralf  
Herzig, Hans Peter  
Date Issued

2010

Publisher

European Optical Society

Published in
Journal of the European Optical Society
Volume

RP5

Article Number

10035s

Subjects

linear displacement

•

speckles

•

non-contact measurements

•

laser measurements

•

optical sensing and sensors

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
OPT  
Available on Infoscience
September 10, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/53548
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