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research article
High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology
We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 μm.
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Name
JEOS_10 Filter Speckles.pdf
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openaccess
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1.13 MB
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Adobe PDF
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571b916cc510bdb7082cc13673f19daa