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  4. Si and Mg doped GaN layers grown by gas source molecular beam epitaxy using ammonia
 
conference paper

Si and Mg doped GaN layers grown by gas source molecular beam epitaxy using ammonia

Massies, J.
•
Leroux, M.
•
Grandjean, N.  
1998
Nitride Semiconductors
Symposium on Nitride Semiconductors, at the 1997 MRS Fall Meeting

The growth of GaN layers was carried out on c-plane sapphire substrates by molecular beam epitaxy (MBE) using NH3. Undoped GaN layers were grown at 830 degrees C with growth rates larger than 1 mu m/h. Optical properties are characteristics of high quality GaN material and the linewidth of x-ray diffraction (0002) rocking curve is less than 350 arcsec. N-and p-type doping were achieved by using solid sources of Si and Mg. No post-growth annealing was needed to activate the Mg accepters. As-grown GaN:Mg layers exhibit hole concentrations of 3x10(17) cm(-3) and mobilities of 8 cm(2)/Vs at 300 K. Light emitting diodes (LEDs) based on GaN p-n homojunction have been processed. The turn on voltage is 3 V and the forward voltage is 3.7 V at 20 mA. The 300 K electroluminescence (EL) peaks at 390 nm.

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