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  4. Packaged MEMS Micromirrors for Cyrogenic Environment
 
conference paper

Packaged MEMS Micromirrors for Cyrogenic Environment

Waldis, S.
•
Zamkostian, F.
•
Lanzoni, P.
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2008
MEMS 2008
  • Details
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Type
conference paper
DOI
10.1109/MEMSYS.2008.4443767
Author(s)
Waldis, S.
Zamkostian, F.
Lanzoni, P.
Noell, W.  
de Rooij, N. F.  
Date Issued

2008

Published in
MEMS 2008
Start page

758

End page

761

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40010
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