conference paper
p-NiO Junction Termination Extensions for High Voltage Vertical GaN Devices
January 1, 2021
2021 33Rd International Symposium On Power Semiconductor Devices And Ics (Ispsd)
In this paper, we illustrate the use of RF-sputtered p-NiO to fabricate Junction Termination Extensions (JTEs) for high-performance vertical GaN-on-Si Schottky Barrier Diodes (SBDs). The GaN epitaxial structures were grown on 6-inch Si wafers by MOCVD. The fabricated SBDs with p-NiO JTEs exhibited a low specific on-state resistance of 3 m Omega cm(2) (20% lower than in reference SBDs without JTEs) and their breakdown voltage was improved to 433 V, the highest value ever reported for GaN-on-Si SBDs. Our work shows the great potential of p-NiO to achieve highly effective players for use in vertical GaN power devices.