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  4. Measuring amplitude and phase of light emerging from microstructures with HRIM
 
conference paper

Measuring amplitude and phase of light emerging from microstructures with HRIM

Scharf, Toralf  
•
Kim, M.-S.  
•
Herzig, Hans Peter  
2011
Proceedings SPIE
EOS Conference on Manufacturing of Optical Components (EOSMOC 2011)

Ultra high-resolution measurements of amplitude and phase fields emerging from fine period amplitude gratings are presented and discussed. In the axial direction periodically repeated features are found, whose origins are the Talbot effect within the Fresnel diffraction regime. The phase field recording leads to a very precise measurement of the localization of the Talbot planes and precisions below 100 nm are demonstrated. The concept of immersion interference microscopy is demonstrated. By accessing the back focal plane of the observation system filtering of diffraction orders provides specific Talbot images and allows to intuitively understand the role of diffraction orders for Talbot effect.

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Type
conference paper
DOI
10.1117/12.895011
Web of Science ID

WOS:000295076900058

Author(s)
Scharf, Toralf  
•
Kim, M.-S.  
•
Herzig, Hans Peter  
Date Issued

2011

Publisher

SPIE Digital Library

Published in
Proceedings SPIE
Series title/Series vol.

Joint Session II: Measurement of Optical Components and Systems; 8082

Volume

8082

Issue

80821O

Subjects

High-resolution interference microscopy

•

Talbot effect

•

Fresnel diffraction

•

Immersion microscopy

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
OPT  
Event nameEvent placeEvent date
EOS Conference on Manufacturing of Optical Components (EOSMOC 2011)

Munich, Germany

May 23-25, 2011

Available on Infoscience
June 28, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/69008
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