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  4. Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk Silicon
 
research article

Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk Silicon

Pott, V.  
•
Moselund, K. E.  
•
Bouvet, D.  
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2008
IEEE Transactions on Nanotechnology

This paper reports on the top-down fabrication and electrical performance of silicon nanowire (SiNW) gate-all-around (GAA) n-type and p-type MOSFET devices integrated on bulk silicon using a local-silicon-on-insulator (SOI) process. The proposed local-SOI fabrication provides various nanowire cross sections: Omega-like, pentagonal, triangular, and circular, all controlled by isotropic etching using nitride spacers and silicon sacrificial oxidation. The reported top-down SiNW fabrication offers excellent control of wire doping and placement, as well as ohmic source and drain contacts. A particular feature of the process is the buildup of a tensile strain in all suspended nanowires, attaining values of few percents, reflected in stress values higher than 2-3 GPa. A very high yield (>90%) is obtained in terms of functionality of long-channel SiNW GAA mosfet. Device characteristics are reported from cryogenic temperature (T = 5 K) up to 150 degC, and promising characteristics in terms of low-field electron mobility, threshold voltage control, and subthreshold slope are demonstrated. Low field mobility for electrons up to 850 cm2 /Vmiddots is reported at room temperature in suspended devices with triangular cross sections; this mobility enhancement is explained by the process-induced tensile strain. In short, suspended SiNW GAA with small triangular cross sections, a single-electron transistor (SET) operation regime is highlighted at T = 5 K. This is attributed to a combined effect of strain and corner conduction in triangular channel cross sections, suggesting the possibility to hybridize CMOS and SET functions by a unique nanowire fabrication platform.

  • Details
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Type
research article
DOI
10.1109/TNANO.2008.2007215
Web of Science ID

WOS:000262364400011

Author(s)
Pott, V.  
Moselund, K. E.  
Bouvet, D.  
De Michielis, L.  
Ionescu, A. M.  
Date Issued

2008

Published in
IEEE Transactions on Nanotechnology
Volume

7

Issue

6

Start page

733

End page

744

Subjects

MOSFET

•

electron mobility

•

elemental semiconductors

•

etching

•

nanofabrication

•

nanowires

•

semiconductor quantum wires

•

silicon

•

silicon-on-insulator

•

single electron transistors

•

tensile strength

•

GAA MOSFET device

•

SET

•

Si

•

charge carrier mobility

•

drain contacts

•

gate-all-around silicon nanowires

•

isotropic etching

•

low-field electron mobility

•

ohmic source

•

silicon-on-insulator process

•

single-electron transistor

•

temperature 293 K to 298 K

•

tensile strain

•

mosfet

•

nanotechnology

•

nanowire

•

single-electron transistor (SET)

•

strain

URL

URL

internal-pdf://Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk -0431332096/Fabrication and Characterization of Gate-All-Around Silicon Nanowires on Bulk Silicon.PDF
Editorial or Peer reviewed

REVIEWED

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January 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45155
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