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  4. High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation
 
research article

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

Hermann, Benedikt  
•
Bernard, Olivier  
•
Muscarella, Luca
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2023
Optics Express

Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore the effect of ultraviolet exposure on process efficiency. Specifically, we demonstrate that shorter wavelengths not only enable enhanced resolution but also yield higher etching selectivity, with an order of magnitude lower pulse energy and significantly higher repetition rates than current practice. This result is obtained using an exposure regime where the laser beam alternates between regimes of self-focusing and defocusing in a stable manner, forming a localized filament. Using this principle, we demonstrate the fabrication of self-organized nano-channels with diameters as small as 120 nm after etching, reaching extreme aspect ratios, exceeding 1500.

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Type
research article
DOI
10.1364/OE.497584
Author(s)
Hermann, Benedikt  
Bernard, Olivier  
Muscarella, Luca
Bellouard, Yves  
Date Issued

2023

Published in
Optics Express
Volume

31

Issue

18

Article Number

29085

Subjects

Femtosecond laser

•

Microfabrication

•

UV laser

•

Silica

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
Available on Infoscience
August 16, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/199925
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