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  4. Pd-functionalized MEMS resonator for hydrogen gas sensing
 
conference poster not in proceedings

Pd-functionalized MEMS resonator for hydrogen gas sensing

Henriksson, Jonas  
•
Villanueva, Luis Guillermo  
•
Kiefer, Thomas  
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2010
Nano-Tera Annual Plenary Meeting

This work presents the fabrication and characterization of a novel hydrogen-detecting micro-resonator based on the expansion of palladium (Pd) as it is exposed to hydrogen (H2) gas. The working principle of the device has been confirmed and it shows a stronger response at a given H2 partial pressure than what theory predicts using bulk Pd material parameters. This may be explained by properties that are specific for Pd thin films in the nanometre range. The results suggest that the presence of very dilute amounts of hydrogen gas could be detected and the dynamic range of the device could be greatly increased if the device is optimized further.

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Type
conference poster not in proceedings
Author(s)
Henriksson, Jonas  
Villanueva, Luis Guillermo  
Kiefer, Thomas  
Brugger, Jürgen  
Date Issued

2010

Subjects

MEMS

•

resonator

•

hydrogen detection

Written at

EPFL

EPFL units
NEMS  
LMIS1  
Event nameEvent placeEvent date
Nano-Tera Annual Plenary Meeting

Bern, Switzerland

April 29, 2010

Available on Infoscience
May 10, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/49986
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