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research article

Interferometric study of piezoelectric degradation in ferroelectric thin films

Kholkin, Andrei
•
Colla, Enrico  
•
Brooks, Keith G.
Show more
1995
Microelectronic Engineering

Degradation of piezoelectric properties has been studied in ferroelectric PZT films by means of optical interferometry. The degradation under de bias and aging of poled films have been observed. The decay of piezoelectric coefficient with time is described by a logarithmic law with aging rates comparable to those of switching polarization. The aging rates are shown to be sensitive to poling conditions and to orientation of the poling field with respect to the direction of preferred polarization. The fatigue measurements revealed a decrease of piezoelectric coefficient with a simultaneous shift of piezoelectric hysteresis loops. Degradation tests on thin membranes covered by PZT films have been reported.

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Type
research article
DOI
10.1016/0167-9317(95)00157-3
Web of Science ID

WOS:A1995TP60800053

Author(s)
Kholkin, Andrei
Colla, Enrico  
Brooks, Keith G.
Muralt, Paul  
Kohli, Markus
Maeder, Thomas
Taylor, David
Setter, Nava  
Date Issued

1995

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

29

Issue

1-4

Start page

261

End page

264

Subjects

electrostrictive strains

•

laser interferometer

Note

Kholkin, A Ecole Polytech Fed Lausanne,Lab Ceram,Ch-1015 Lausanne,Switzerland, Tp608, Times Cited:19, Cited References Count:16

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233262
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