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  4. Development of low-temperature thick-film materials for piezoresistive sensors
 
conference paper

Development of low-temperature thick-film materials for piezoresistive sensors

Jacq, Caroline  
•
Maeder, Thomas  
•
Vionnet-Menot, Sonia  
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2005
Sintering’05
Sintering’05

Thick-film materials are very advantageous for piezoresistive pressure and force sensors because of ease of processing, reliability and low cost. However, their applications are restricted because standard thick-film materials require processing temperatures around 850°C, which essentially restricts them to ceramic substrates. In this work, we examine the processing and properties of thick-film dielectric and resistor compositions designed to sinter at lower temperatures, making them compatible with high-strength stainless steel alloys (<700°C). Both dielectric and resistor materials are based on a lead borosilicate glass matrix, with suitable filler materials such as SiO2 (quartz) and Al2O3 for the dielectrics and RuO2 for the resistor. The materials were investigated X-ray diffraction, mechanical and electrical testing. During firing, the thick-film materials undergo liquid-phase sintering through the glass matrix. Glass-filler chemical interactions are significant in the case of SiO2 filler, and very small with Al2O3 or RuO2. By adjusting the fillers, the glass composition and the processing parameters, we can obtain suitable thick-film materials for piezoresistive sensors with low processing temperatures, compatible with high-strength steel substrates.

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Type
conference paper
Author(s)
Jacq, Caroline  
Maeder, Thomas  
Vionnet-Menot, Sonia  
Grimaldi, Claudio  
Saglini, Igor
Ryser, Peter  
Carreno-Morelli, Efrain
Date Issued

2005

Published in
Sintering’05
Start page

3b1, 200

End page

203

Subjects

Technologie des Couches Epaisses

•

thick-film technology

•

sensors

•

capteurs

•

metal substrates

Note

Diélectriques basse température avec V6 / V8

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LPM  
Event nameEvent placeEvent date
Sintering’05

Grenoble (FR)

9/2005

Available on Infoscience
June 27, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/232412
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