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  4. Design, fabrication and testing of micro-optical components for sensors and microsystems
 
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conference paper

Design, fabrication and testing of micro-optical components for sensors and microsystems

Völkel, R.
•
Nussbaum, Ph.
•
Roulet, H.-Ch.
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1997
Micro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications
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