research article
Effect of filler behavior on nanocomposite SU8 photoresist for moving micro- parts
The use of low-stress SU8 nanocomposites as a functional material for micro- parts and coating applications is described in this paper. It was found that the nanoparticles lower the internal stress and decrease the wear rate and frictional coefficient of the SU8 epoxy. The applicability of this technology is demonstrated on gear wheels configuration and coating multilayer capping technology on moving micro-parts
Type
research article
Web of Science ID
WOS:000237581900155
Author(s)
Date Issued
2006
Published in
Volume
83
Start page
1273
End page
1276
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 20, 2006
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