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On the electron sheath theory and its applications in plasma-surface interactions

Sun, Guangyu
•
Zhang, Shu
•
Sun, Anbang
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September 1, 2022
Plasma Science & Technology

In this work, an improved understanding of electron sheath theory is provided using both fluid and kinetic approaches while elaborating on their implications for plasma-surface interactions. A fluid model is proposed considering the electron presheath structure, avoiding the singularity in electron sheath Child-Langmuir law which overestimates the sheath potential. Subsequently, a kinetic model of electron sheath is established, showing considerably different sheath profiles in respect to the fluid model due to non-Maxwellian electron velocity distribution function and finite ion temperature. The kinetic model is then further generalized and involves a more realistic truncated ion velocity distribution function. It is demonstrated that such a distribution function yields a super-thermal electron sheath whose entering velocity at the sheath edge is greater than the Bohm criterion prediction. Furthermore, an attempt is made to describe the electron presheath-sheath coupling within the kinetic framework, showing a necessary compromise between a realistic sheath entrance and the inclusion of kinetic effects. Finally, the secondary electron emissions induced by sheath-accelerated plasma electrons in an electron sheath are analysed and the influence of backscattering is discussed.

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