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  4. Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS
 
conference paper

Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS

Spettel, Jasmin
•
Andrianov, Nikolai
•
Dubois, Florian
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2024
International Conference on Optical MEMS and Nanophotonics
International Conference on Optical MEMS and Nanophotonics

This study explores the utilization of sputtered aluminum nitride (AlN) thin film on insulator as a platform for integrated photonic MEMS. We experimentally demonstrate proof-of-concept photonic ring resonators with Q-factors up to 31000 at a resonance wavelength of 1.5795 μm.

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