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research article

Fabrication of multilayered nanofluidic membranes through silicon templates

Varricchio, Stefano S. G.
•
Cyrille, Hibert
•
Arnaud, Bertsch
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2015
Nanoscale

We present a new fabrication method for solid-state nanoporous membranes based on sacrificial template structures made of silicon. The process consists of creating membranes by evaporating thin-films on sacrificial templates which, after their selective removal, opens the nanopores and releases the free-standing membranes. This way it is possible to define the geometry of the pore by design and to build the membrane by stacking thin-films of various materials through evaporation. Such a membrane with controlled porosity, pore geometry, thickness and nano-channel composition provides new opportunities for selective chemical functionalization, gating, electrical sensing or electrical stimulation inside the nanopore.

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Type
research article
DOI
10.1039/C5NR05288B
Web of Science ID

WOS:000365982700016

Author(s)
Varricchio, Stefano S. G.
Cyrille, Hibert
Arnaud, Bertsch
Philippe, Renaud
Date Issued

2015

Published in
Nanoscale
Volume

7

Issue

48

Start page

20451

End page

20459

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/121484
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