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  4. DRIE and FIB combination for nanotip fabrication
 
conference poster

DRIE and FIB combination for nanotip fabrication

Villanueva, G.  
•
Plaza, J. A.
•
Sanchez-Amores, A.
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2004
30th International Conference on Micro- and Nano- Engineering (MNE)
30th International Conference on Micro- and Nano- Engineering (MNE)
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