Skip to main content
Infoscience
English
French
Log In
Log in with EPFL account
Log in with local account
Infoscience
English
French
Log In
Log in with EPFL account
Log in with local account
Home
Academic and Research Output
Conferences, Workshops, Symposiums, and Seminars
Optical testing of fine gratings structures
conference paper
Optical testing of fine gratings structures
Blattner, P.
•
Herzig, H. P.
1996
Optical Inspection and Micromeasurements
Details
Metrics