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research article

Electromagnetic sources of nonuniformity in large area capacitive reactors

Howling, A. A.  
•
Sansonnens, L.  
•
Hollenstein, C.  
2007
Thin Solid Films

Theory and experiment show that two electromagnetic modes are necessary and sufficient to determine the field nonuniformity within a parallel-plate rf capacitive plasma reactor. These two modes give rise to the standing wave effect and the telegraph effect. The standing wave effect is associated with high frequencies in large reactors where the reactor size is larger than about a tenth of the vacuum wavelength of the rf excitation. The telegraph effect is associated with asymmetric electrode areas, which necessitates the redistribution of rf current along the plasma to maintain rf current continuity. (c) 2006 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.tsf.2006.10.093
Web of Science ID

WOS:000245739600047

Author(s)
Howling, A. A.  
Sansonnens, L.  
Hollenstein, C.  
Date Issued

2007

Published in
Thin Solid Films
Volume

515

Issue

12

Start page

5059

End page

5064

Note

Invited talk, paper 8_02

URL

URL

http://www.plasma.coe.nagoya-u.ac.jp/DPS2005/
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Available on Infoscience
April 16, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/22410
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